%0 Journal Article %1 journals/tie/BacherMM95 %A Bacher, Walter %A Menz, Wolfgang %A Mohr, Jürgen %D 1995 %J IEEE Trans. Ind. Electron. %K dblp %N 5 %P 431-441 %T The LIGA technique and its potential for microsystems-a survey. %U http://dblp.uni-trier.de/db/journals/tie/tie42.html#BacherMM95 %V 42

@article{journals/tie/BacherMM95, added-at = {2020-05-22T00:00:00.000+0200}, author = {Bacher, Walter and Menz, Wolfgang and Mohr, Jürgen}, biburl = {https://www.bibsonomy.org/bibtex/2bef4695ed172a850f7376cd95d10e773/dblp}, ee = {https://doi.org/10.1109/41.464604}, interhash = {7dcb23e02fda5fa25a540675758db5ac}, intrahash = {bef4695ed172a850f7376cd95d10e773}, journal = {IEEE Trans. Ind. Electron.}, keywords = {dblp}, number = 5, pages = {431-441}, timestamp = {2020-05-23T11:39:40.000+0200}, title = {The LIGA technique and its potential for microsystems-a survey.}, url = {http://dblp.uni-trier.de/db/journals/tie/tie42.html#BacherMM95}, volume = 42, year = 1995 }