%0 Journal Article %1 journals/mr/KhaledKBKANW17 %A Khaled, Ahmad %A Kljucar, Luka %A Brand, Sebastian %A Kögel, Michael %A Aertgeerts, Robert %A Nicasy, Ruben %A Wolf, Ingrid De %D 2017 %J Microelectron. Reliab. %K dblp %P 238-242 %T Study of GHz-SAM sensitivity to delamination in BEOL layers. %U http://dblp.uni-trier.de/db/journals/mr/mr76.html#KhaledKBKANW17 %V 76-77

@article{journals/mr/KhaledKBKANW17, added-at = {2023-09-30T00:00:00.000+0200}, author = {Khaled, Ahmad and Kljucar, Luka and Brand, Sebastian and Kögel, Michael and Aertgeerts, Robert and Nicasy, Ruben and Wolf, Ingrid De}, biburl = {https://www.bibsonomy.org/bibtex/23b7711e56db66efad57a81824576c6f1/dblp}, ee = {https://doi.org/10.1016/j.microrel.2017.06.075}, interhash = {0b0bf9e1517304536b38804846e95b4c}, intrahash = {3b7711e56db66efad57a81824576c6f1}, journal = {Microelectron. Reliab.}, keywords = {dblp}, pages = {238-242}, timestamp = {2024-04-09T02:49:06.000+0200}, title = {Study of GHz-SAM sensitivity to delamination in BEOL layers.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr76.html#KhaledKBKANW17}, volume = {76-77}, year = 2017 }