%0 Journal Article %1 journals/cor/QiaoWZB15 %A Qiao, Yan %A Wu, Naiqi %A Zhu, Qinghua %A Bai, Liping %D 2015 %J Comput. Oper. Res. %K dblp %P 252-260 %T Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times. %U http://dblp.uni-trier.de/db/journals/cor/cor53.html#QiaoWZB15 %V 53

@article{journals/cor/QiaoWZB15, added-at = {2021-02-05T00:00:00.000+0100}, author = {Qiao, Yan and Wu, Naiqi and Zhu, Qinghua and Bai, Liping}, biburl = {https://www.bibsonomy.org/bibtex/20bce9002113b16e135b843fd59432fd9/dblp}, ee = {https://doi.org/10.1016/j.cor.2014.03.024}, interhash = {18290d8ae40b4796c76e664fcc2e0e90}, intrahash = {0bce9002113b16e135b843fd59432fd9}, journal = {Comput. Oper. Res.}, keywords = {dblp}, pages = {252-260}, timestamp = {2024-04-08T14:28:11.000+0200}, title = {Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times.}, url = {http://dblp.uni-trier.de/db/journals/cor/cor53.html#QiaoWZB15}, volume = 53, year = 2015 }