%0 Journal Article %1 journals/sensors/SunLLSLDW21 %A Sun, Changhe %A Liu, Yufei %A Li, Bolun %A Su, Wenqu %A Luo, Mingzhang %A Du, Guofeng %A Wu, Yaming %D 2021 %J Sensors %K dblp %N 16 %P 5513 %T Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. %U http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#SunLLSLDW21 %V 21

@article{journals/sensors/SunLLSLDW21, added-at = {2021-09-01T00:00:00.000+0200}, author = {Sun, Changhe and Liu, Yufei and Li, Bolun and Su, Wenqu and Luo, Mingzhang and Du, Guofeng and Wu, Yaming}, biburl = {https://www.bibsonomy.org/bibtex/2bdf0ee968360aec439ce1917ac32f1dc/dblp}, ee = {https://doi.org/10.3390/s21165513}, interhash = {1e1985e2a9056e09d0da4aa0748f8859}, intrahash = {bdf0ee968360aec439ce1917ac32f1dc}, journal = {Sensors}, keywords = {dblp}, number = 16, pages = 5513, timestamp = {2024-04-09T04:28:43.000+0200}, title = {Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#SunLLSLDW21}, volume = 21, year = 2021 }