%0 Conference Paper %1 conf/case/YangWSQ18 %A Yang, FaJun %A Wu, Naiqi %A Su, Rong %A Qiao, Yan %B CASE %D 2018 %I IEEE %K dblp %P 241-246 %T Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations. %U http://dblp.uni-trier.de/db/conf/case/case2018.html#YangWSQ18 %@ 978-1-5386-3593-3

@inproceedings{conf/case/YangWSQ18, added-at = {2021-12-22T00:00:00.000+0100}, author = {Yang, FaJun and Wu, Naiqi and Su, Rong and Qiao, Yan}, biburl = {https://www.bibsonomy.org/bibtex/2a9ede52ebce801d6febe571b0c160e17/dblp}, booktitle = {CASE}, crossref = {conf/case/2018}, ee = {https://doi.org/10.1109/COASE.2018.8560461}, interhash = {3484efc348de498df0ef6eb8458c72b4}, intrahash = {a9ede52ebce801d6febe571b0c160e17}, isbn = {978-1-5386-3593-3}, keywords = {dblp}, pages = {241-246}, publisher = {IEEE}, timestamp = {2024-04-10T22:40:29.000+0200}, title = {Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations.}, url = {http://dblp.uni-trier.de/db/conf/case/case2018.html#YangWSQ18}, year = 2018 }