%0 Conference Paper %1 conf/wsc/0001EFMW21 %A Chien, Chen-Fu %A Ehm, Hans %A Fowler, John W. %A Mönch, Lars %A Wu, Cheng-Hung %B WSC %D 2021 %I IEEE %K dblp %P 1-8 %T Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2021.html#0001EFMW21 %@ 978-1-6654-3311-2

@inproceedings{conf/wsc/0001EFMW21, added-at = {2023-06-26T00:00:00.000+0200}, author = {Chien, Chen-Fu and Ehm, Hans and Fowler, John W. and Mönch, Lars and Wu, Cheng-Hung}, biburl = {https://www.bibsonomy.org/bibtex/2e03d428fe271a9b505b67c71238f8975/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2021}, ee = {https://doi.org/10.1109/WSC52266.2021.9715399}, interhash = {3f52fa80256c4ee6c83962848117c67f}, intrahash = {e03d428fe271a9b505b67c71238f8975}, isbn = {978-1-6654-3311-2}, keywords = {dblp}, pages = {1-8}, publisher = {IEEE}, timestamp = {2024-04-09T16:47:57.000+0200}, title = {Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2021.html#0001EFMW21}, year = 2021 }