%0 Conference Paper %1 conf/ispd/BermanKVWZ99 %A Berman, Piotr %A Kahng, Andrew B. %A Vidhani, Devendra %A Wang, Huijuan %A Zelikovsky, Alexander %B ISPD %D 1999 %E Wong, D. F. %I ACM %K dblp %P 121-126 %T Optimal phase conflict removal for layout of dark field alternating phase shifting masks. %U http://dblp.uni-trier.de/db/conf/ispd/ispd1999.html#BermanKVWZ99 %@ 1-58113-089-9

@inproceedings{conf/ispd/BermanKVWZ99, added-at = {2018-11-06T00:00:00.000+0100}, author = {Berman, Piotr and Kahng, Andrew B. and Vidhani, Devendra and Wang, Huijuan and Zelikovsky, Alexander}, biburl = {https://www.bibsonomy.org/bibtex/212b6965493856906756d1185188ff280/dblp}, booktitle = {ISPD}, crossref = {conf/ispd/1999}, editor = {Wong, D. F.}, ee = {https://doi.org/10.1145/299996.300037}, interhash = {513a2b05e350807e00816c8218db7ac7}, intrahash = {12b6965493856906756d1185188ff280}, isbn = {1-58113-089-9}, keywords = {dblp}, pages = {121-126}, publisher = {ACM}, timestamp = {2024-04-09T16:38:33.000+0200}, title = {Optimal phase conflict removal for layout of dark field alternating phase shifting masks.}, url = {http://dblp.uni-trier.de/db/conf/ispd/ispd1999.html#BermanKVWZ99}, year = 1999 }