%0 Journal Article %1 journals/access/ZamanARW20 %A Zaman, Adnan %A Alsolami, Abdulrahman %A Rivera, Ivan F. %A Wang, Jing %D 2020 %J IEEE Access %K dblp %P 139266-139273 %T Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators. %U http://dblp.uni-trier.de/db/journals/access/access8.html#ZamanARW20 %V 8

@article{journals/access/ZamanARW20, added-at = {2020-08-14T00:00:00.000+0200}, author = {Zaman, Adnan and Alsolami, Abdulrahman and Rivera, Ivan F. and Wang, Jing}, biburl = {https://www.bibsonomy.org/bibtex/27dce028ba897253661555116a39aa8ce/dblp}, ee = {https://doi.org/10.1109/ACCESS.2020.3012520}, interhash = {5a1cb56a3b1a97b99f0443185336b73a}, intrahash = {7dce028ba897253661555116a39aa8ce}, journal = {IEEE Access}, keywords = {dblp}, pages = {139266-139273}, timestamp = {2020-08-18T11:43:09.000+0200}, title = {Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators.}, url = {http://dblp.uni-trier.de/db/journals/access/access8.html#ZamanARW20}, volume = 8, year = 2020 }