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%0 Journal Article
%1 journals/jzusc/ZhuLCYY12
%A jiao Zhu, Jiao
%A hua Luo, Xiao
%A sheng Chen, Li
%A Ye, Yi
%A Yan, Xiaolang
%D 2012
%J Journal of Zhejiang University - Science C
%K dblp
%N 5
%P 376-384
%T Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process.
%U http://dblp.uni-trier.de/db/journals/jzusc/jzusc13.html#ZhuLCYY12
%V 13
@article{journals/jzusc/ZhuLCYY12,
added-at = {2012-05-03T00:00:00.000+0200},
author = {jiao Zhu, Jiao and hua Luo, Xiao and sheng Chen, Li and Ye, Yi and Yan, Xiaolang},
biburl = {https://www.bibsonomy.org/bibtex/28b582b785b49ed6f762638bb6fa67246/dblp},
ee = {http://dx.doi.org/10.1631/jzus.C1100242},
interhash = {5bec9e8b51e3c75a9ef7a7e779ed3ed8},
intrahash = {8b582b785b49ed6f762638bb6fa67246},
journal = {Journal of Zhejiang University - Science C},
keywords = {dblp},
number = 5,
pages = {376-384},
timestamp = {2012-05-04T11:39:47.000+0200},
title = {Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process.},
url = {http://dblp.uni-trier.de/db/journals/jzusc/jzusc13.html#ZhuLCYY12},
volume = 13,
year = 2012
}
