%0 Conference Paper %1 conf/nems/ZhuZHZ13 %A Zhu, Fu-Yun %A Zhang, Xiao-Sheng %A Hu, Wei %A Zhang, Haixia %B NEMS %D 2013 %I IEEE %K dblp %P 1034-1037 %T Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhuZHZ13

@inproceedings{conf/nems/ZhuZHZ13, added-at = {2018-06-14T00:00:00.000+0200}, author = {Zhu, Fu-Yun and Zhang, Xiao-Sheng and Hu, Wei and Zhang, Haixia}, biburl = {https://www.bibsonomy.org/bibtex/2b1d6df7519d2e8a035c9e0674764f300/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559899}, interhash = {81140cf618625669fa6a677daba39a97}, intrahash = {b1d6df7519d2e8a035c9e0674764f300}, keywords = {dblp}, pages = {1034-1037}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:37.000+0200}, title = {Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhuZHZ13}, year = 2013 }