%0 Journal Article %1 journals/sensors/LeeIKLM19 %A Lee, Jaewoo %A Im, Jong-Pil %A Kim, Jeong-Hun %A Lim, Sol-Yee %A Moon, Seung-Eon %D 2019 %J Sensors %K dblp %N 3 %P 488 %T Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor. %U http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#LeeIKLM19 %V 19

@article{journals/sensors/LeeIKLM19, added-at = {2021-04-09T00:00:00.000+0200}, author = {Lee, Jaewoo and Im, Jong-Pil and Kim, Jeong-Hun and Lim, Sol-Yee and Moon, Seung-Eon}, biburl = {https://www.bibsonomy.org/bibtex/2aeef1646ec78a95b99cd07397520a944/dblp}, ee = {https://www.wikidata.org/entity/Q64276316}, interhash = {943879bd6e2d9d16bfc2be7ab1f214bc}, intrahash = {aeef1646ec78a95b99cd07397520a944}, journal = {Sensors}, keywords = {dblp}, number = 3, pages = 488, timestamp = {2024-04-09T04:29:51.000+0200}, title = {Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#LeeIKLM19}, volume = 19, year = 2019 }