%0 Conference Paper %1 conf/essderc/ShiSCCSSSMLH18 %A Shi, Jinglin %A Sidelnicov, A. %A Chew, Kok Wai J. %A Chin, Mei See %A Schippel, C. %A dos Santos, J. M. M. %A Schlaphof, Frank %A Meinshausen, Lutz %A Long, John R. %A Harame, David L. %B ESSDERC %D 2018 %I IEEE %K dblp %P 190-193 %T Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes. %U http://dblp.uni-trier.de/db/conf/essderc/essderc2018.html#ShiSCCSSSMLH18 %@ 978-1-5386-5401-9

@inproceedings{conf/essderc/ShiSCCSSSMLH18, added-at = {2021-03-26T00:00:00.000+0100}, author = {Shi, Jinglin and Sidelnicov, A. and Chew, Kok Wai J. and Chin, Mei See and Schippel, C. and dos Santos, J. M. M. and Schlaphof, Frank and Meinshausen, Lutz and Long, John R. and Harame, David L.}, biburl = {https://www.bibsonomy.org/bibtex/2512e7f6fe96e0f41ede20906e54befb1/dblp}, booktitle = {ESSDERC}, crossref = {conf/essderc/2018}, ee = {https://doi.org/10.1109/ESSDERC.2018.8486905}, interhash = {96900de4bfb68aeaaff7a61a0cd82a34}, intrahash = {512e7f6fe96e0f41ede20906e54befb1}, isbn = {978-1-5386-5401-9}, keywords = {dblp}, pages = {190-193}, publisher = {IEEE}, timestamp = {2024-04-10T10:01:29.000+0200}, title = {Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes.}, url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2018.html#ShiSCCSSSMLH18}, year = 2018 }