%0 Journal Article %1 journals/jsce/JiangYZLY14 %A Jiang, Yi %A Yang, Kaiming %A Zhu, Yu %A Li, Xin %A Yu, Dongdong %D 2014 %J J. Syst. Control. Eng. %K dblp %N 2 %P 97-106 %T Optimal feedforward control with a parametric structure applied to a wafer stage. %U http://dblp.uni-trier.de/db/journals/jsce/jsce228.html#JiangYZLY14 %V 228

@article{journals/jsce/JiangYZLY14, added-at = {2020-11-05T00:00:00.000+0100}, author = {Jiang, Yi and Yang, Kaiming and Zhu, Yu and Li, Xin and Yu, Dongdong}, biburl = {https://www.bibsonomy.org/bibtex/21787c5bcc1d6e877677f80654e15dbf8/dblp}, ee = {https://doi.org/10.1177/0959651813506897}, interhash = {a26859ac472c3dcfedf4d753ceaad0cc}, intrahash = {1787c5bcc1d6e877677f80654e15dbf8}, journal = {J. Syst. Control. Eng.}, keywords = {dblp}, number = 2, pages = {97-106}, timestamp = {2020-11-06T11:35:28.000+0100}, title = {Optimal feedforward control with a parametric structure applied to a wafer stage.}, url = {http://dblp.uni-trier.de/db/journals/jsce/jsce228.html#JiangYZLY14}, volume = 228, year = 2014 }