%0 Conference Paper %1 conf/mue/Kim13d %A Kim, Sang-Chul %B MUE %D 2013 %E Park, James J. %E Ng, Joseph Kee-Yin %E Jeong, Hwa-Young %E Waluyo, Agustinus Borgy %I Springer %K dblp %P 1091-1097 %T Semiconductor Monitoring System for Etching Process. %U http://dblp.uni-trier.de/db/conf/mue/mue2013.html#Kim13d %V 240 %@ 978-94-007-6737-9

@inproceedings{conf/mue/Kim13d, added-at = {2014-02-03T00:00:00.000+0100}, author = {Kim, Sang-Chul}, biburl = {https://www.bibsonomy.org/bibtex/2eb0886b3f35a4d2bafd382cf88efeeb3/dblp}, booktitle = {MUE}, crossref = {conf/mue/2013}, editor = {Park, James J. and Ng, Joseph Kee-Yin and Jeong, Hwa-Young and Waluyo, Agustinus Borgy}, ee = {http://dx.doi.org/10.1007/978-94-007-6738-6_134}, interhash = {a72a76c0d43ee0e2a9c9ea90f58bc61c}, intrahash = {eb0886b3f35a4d2bafd382cf88efeeb3}, isbn = {978-94-007-6737-9}, keywords = {dblp}, pages = {1091-1097}, publisher = {Springer}, series = {Lecture Notes in Electrical Engineering}, timestamp = {2015-07-29T11:43:40.000+0200}, title = {Semiconductor Monitoring System for Etching Process.}, url = {http://dblp.uni-trier.de/db/conf/mue/mue2013.html#Kim13d}, volume = 240, year = 2013 }