%0 Thesis %1 stepanov2010absolute %A Stepanov, Sergey %D 2010 %K %T Absolute number density and kinetic analysis of CF, CF_1tn2 and C_1tn2_1tn4 molecules in pulsed CF_1tn4,H_1tn2 rf plasmas

@phdthesis{stepanov2010absolute, added-at = {2023-12-13T06:06:44.000+0100}, author = {Stepanov, Sergey}, biburl = {https://www.bibsonomy.org/bibtex/2dcbfc9b5f779809e7b4255a6663e7c0c/admin}, dnbtitleid = {1008997218}, interhash = {aa7f7480cb316127eba9e16347d6dcbb}, intrahash = {dcbfc9b5f779809e7b4255a6663e7c0c}, keywords = {}, school = {Uni Greifswald}, timestamp = {2023-12-13T06:06:44.000+0100}, title = {Absolute number density and kinetic analysis of CF, CF_1tn2 and C_1tn2_1tn4 molecules in pulsed CF_1tn4,H_1tn2 rf plasmas}, year = 2010 }