%0 Conference Paper %1 conf/nems/GanJMS11 %A Gan, Hua %A Jin, Yufeng %A Miao, Min %A Sun, Xin %B NEMS %D 2011 %I IEEE %K dblp %P 796-799 %T A novel LTCC capacitive accelerometer embedded in LTCC packaging substrate. %U http://dblp.uni-trier.de/db/conf/nems/nems2011.html#GanJMS11 %@ 978-1-61284-775-7

@inproceedings{conf/nems/GanJMS11, added-at = {2017-05-17T00:00:00.000+0200}, author = {Gan, Hua and Jin, Yufeng and Miao, Min and Sun, Xin}, biburl = {https://www.bibsonomy.org/bibtex/24d98c1153b44d22d57f709a8c7975bd0/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2011}, ee = {https://doi.org/10.1109/NEMS.2011.6017474}, interhash = {b68680dd4f9bf023238b658c2c28f51b}, intrahash = {4d98c1153b44d22d57f709a8c7975bd0}, isbn = {978-1-61284-775-7}, keywords = {dblp}, pages = {796-799}, publisher = {IEEE}, timestamp = {2019-10-17T22:12:53.000+0200}, title = {A novel LTCC capacitive accelerometer embedded in LTCC packaging substrate.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2011.html#GanJMS11}, year = 2011 }