Please log in to take part in the discussion (add own reviews or comments).
Cite this publication
More citation styles
- please select -
%0 Conference Paper
%1 conf/asicon/ZhangSWZ13
%A Zhang, Chun-Min
%A Sun, Qing-Qing
%A Wang, Peng-Fei
%A Zhang, David Wei
%B ASICON
%D 2013
%I IEEE
%K dblp
%P 1-4
%T PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide.
%U http://dblp.uni-trier.de/db/conf/asicon/asicon2013.html#ZhangSWZ13
%@ 978-1-4673-6415-7
@inproceedings{conf/asicon/ZhangSWZ13,
added-at = {2015-02-23T00:00:00.000+0100},
author = {Zhang, Chun-Min and Sun, Qing-Qing and Wang, Peng-Fei and Zhang, David Wei},
biburl = {https://www.bibsonomy.org/bibtex/282b74e087e5330982a37af19ecd381dd/dblp},
booktitle = {ASICON},
crossref = {conf/asicon/2013},
ee = {http://dx.doi.org/10.1109/ASICON.2013.6811922},
interhash = {ca4ad9359381a6d850b6dedea7d2486d},
intrahash = {82b74e087e5330982a37af19ecd381dd},
isbn = {978-1-4673-6415-7},
keywords = {dblp},
pages = {1-4},
publisher = {IEEE},
timestamp = {2015-06-19T16:17:58.000+0200},
title = {PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide.},
url = {http://dblp.uni-trier.de/db/conf/asicon/asicon2013.html#ZhangSWZ13},
year = 2013
}
