%0 Journal Article %1 journals/mr/LeeWJLRSLCC10 %A Lee, Maw-Shung %A Wu, Sean %A Jhong, Shih-Bin %A Liu, Kuan-Ting %A Ro, Ruyen %A Shih, Chia-Chi %A Lin, Zhi-Xun %A Chen, Kang-I %A Cheng, Shou-Chang %D 2010 %J Microelectron. Reliab. %K dblp %N 12 %P 1984-1987 %T Influence of substrate temperature to prepare (1 0 3) oriented AlN films. %U http://dblp.uni-trier.de/db/journals/mr/mr50.html#LeeWJLRSLCC10 %V 50

@article{journals/mr/LeeWJLRSLCC10, added-at = {2020-02-22T00:00:00.000+0100}, author = {Lee, Maw-Shung and Wu, Sean and Jhong, Shih-Bin and Liu, Kuan-Ting and Ro, Ruyen and Shih, Chia-Chi and Lin, Zhi-Xun and Chen, Kang-I and Cheng, Shou-Chang}, biburl = {https://www.bibsonomy.org/bibtex/265593134d5e7fa8b0c4abb45ce673c5d/dblp}, ee = {https://doi.org/10.1016/j.microrel.2010.06.010}, interhash = {d26bf0ac28cec44dd8787f60d49d5c39}, intrahash = {65593134d5e7fa8b0c4abb45ce673c5d}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 12, pages = {1984-1987}, timestamp = {2020-02-25T13:29:02.000+0100}, title = {Influence of substrate temperature to prepare (1 0 3) oriented AlN films.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr50.html#LeeWJLRSLCC10}, volume = 50, year = 2010 }