%0 Journal Article %1 marconnet2009microfabricated %A Marconnet, Amy M %A He, Mike M %A Sengele, Sean %A Ho, Sung-Jin %A Jiang, Hongrui %A Ferrier, Nicola J %A Van Der Weide, Daniel W %A Madhavan, Vidhya %A Nelson, Natalie %A Booske, John H %D 2009 %I IEEE %J Electron Devices, IEEE Transactions on %K MillimeterWave Terahertz Waveguides myown %N 5 %P 721--729 %T Microfabricated Silicon High-Frequency Waveguide Couplers and Antennas %U http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4808163 %V 56 %X A method has been developed to fabricate waveguide-to-waveguide couplers and tapered dielectric rod antennas for the millimeter-wave regime from microetched silicon. A proof-of-concept study shows that the structures can be realized using relatively simple wet etching and robotic process control. Experimental measurements of the waveguide-waveguide couplers agree in key features with simulations. The results indicate that two-stepped tapers perform nearly as well as smooth linear tapers, but are much easier to fabricate. Coupling transmissivity of better than -1 dB, and peak antenna gain of 8-10 dB are indicated at W-band frequencies. Lateral dimension etch control of 5-mum precision was realized. To solve a challenge of controlling the length of the first step, either an improved masking method or a switch to dry etching processes is required.

@article{marconnet2009microfabricated, abstract = {A method has been developed to fabricate waveguide-to-waveguide couplers and tapered dielectric rod antennas for the millimeter-wave regime from microetched silicon. A proof-of-concept study shows that the structures can be realized using relatively simple wet etching and robotic process control. Experimental measurements of the waveguide-waveguide couplers agree in key features with simulations. The results indicate that two-stepped tapers perform nearly as well as smooth linear tapers, but are much easier to fabricate. Coupling transmissivity of better than -1 dB, and peak antenna gain of 8-10 dB are indicated at W-band frequencies. Lateral dimension etch control of 5-mum precision was realized. To solve a challenge of controlling the length of the first step, either an improved masking method or a switch to dry etching processes is required. }, added-at = {2015-04-23T20:58:41.000+0200}, author = {Marconnet, Amy M and He, Mike M and Sengele, Sean and Ho, Sung-Jin and Jiang, Hongrui and Ferrier, Nicola J and Van Der Weide, Daniel W and Madhavan, Vidhya and Nelson, Natalie and Booske, John H}, biburl = {https://www.bibsonomy.org/bibtex/28f6c679e32b3dee35aa3b488c51f830d/tennocrama}, interhash = {d973f04d9669dde39cd136367c1a88e2}, intrahash = {8f6c679e32b3dee35aa3b488c51f830d}, journal = {Electron Devices, IEEE Transactions on}, keywords = {MillimeterWave Terahertz Waveguides myown}, number = 5, pages = {721--729}, publisher = {IEEE}, timestamp = {2015-04-23T20:58:41.000+0200}, title = {Microfabricated Silicon High-Frequency Waveguide Couplers and Antennas}, url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4808163}, volume = 56, year = 2009 }