%0 Thesis %1 schuster2009simulation %A Schuster, Thomas %D 2009 %K %T Simulation von Lichtbeugung an Kreuzgitter-Strukturen und deren Anwendung in der Scatterometrie

@phdthesis{schuster2009simulation, added-at = {2023-12-14T14:19:03.000+0100}, author = {Schuster, Thomas}, biburl = {https://www.bibsonomy.org/bibtex/2298831140470e42796bdfe7ce471013f/admin}, dnbtitleid = {1000468453}, interhash = {de8214d4874b3820ea3432183d60d780}, intrahash = {298831140470e42796bdfe7ce471013f}, keywords = {}, school = {Uni Stuttgart}, timestamp = {2023-12-14T14:19:03.000+0100}, title = {Simulation von Lichtbeugung an Kreuzgitter-Strukturen und deren Anwendung in der Scatterometrie}, year = 2009 }