%0 Journal Article %1 journals/ieicetc/NagasawaTTYMCYY21 %A Nagasawa, Shuichi %A Tanaka, Masamitsu %A Takeuchi, Naoki %A Yamanashi, Yuki %A Miyajima, Shigeyuki %A China, Fumihiro %A Yamae, Taiki %A Yamazaki, Koki %A Somei, Yuta %A Sega, Naonori %A Mizugaki, Yoshinao %A Myoren, Hiroaki %A Terai, Hirotaka %A Hidaka, Mutsuo %A Yoshikawa, Nobuyuki %A Fujimaki, Akira %D 2021 %J IEICE Trans. Electron. %K dblp %N 9 %P 435-445 %T Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation. %U http://dblp.uni-trier.de/db/journals/ieicetc/ieicetc104.html#NagasawaTTYMCYY21 %V 104-C

@article{journals/ieicetc/NagasawaTTYMCYY21, added-at = {2023-09-30T00:00:00.000+0200}, author = {Nagasawa, Shuichi and Tanaka, Masamitsu and Takeuchi, Naoki and Yamanashi, Yuki and Miyajima, Shigeyuki and China, Fumihiro and Yamae, Taiki and Yamazaki, Koki and Somei, Yuta and Sega, Naonori and Mizugaki, Yoshinao and Myoren, Hiroaki and Terai, Hirotaka and Hidaka, Mutsuo and Yoshikawa, Nobuyuki and Fujimaki, Akira}, biburl = {https://www.bibsonomy.org/bibtex/2232e5157a11de5d7a305f8694520123f/dblp}, ee = {https://doi.org/10.1587/transele.2020sup0001}, interhash = {e2f815e2db15adb5ff09a3a6545285e6}, intrahash = {232e5157a11de5d7a305f8694520123f}, journal = {IEICE Trans. Electron.}, keywords = {dblp}, number = 9, pages = {435-445}, timestamp = {2024-04-09T03:20:35.000+0200}, title = {Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation.}, url = {http://dblp.uni-trier.de/db/journals/ieicetc/ieicetc104.html#NagasawaTTYMCYY21}, volume = {104-C}, year = 2021 }