%0 Journal Article %1 6104089 %A Lee, Jaeho %A Kim, SangBum %A Marconnet, A. %A in 't Zandt, M.A.A. %A Asheghi, Mehdi %A Wong, H.-S.P. %A Goodson, Kenneth E. %D 2012 %J Microelectromechanical Systems, Journal of %K ElectrothermalMetrology InfraredMicroscopy SeebeckCoefficient Thermoelectrics myown %N 1 %P 4-6 %R 10.1109/JMEMS.2011.2175704 %T Thermoelectric Characterization and Power Generation Using a Silicon-on-Insulator Substrate %U http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6104089 %V 21 %X We demonstrate techniques for measuring thermoelectric voltages and generating on-chip power using a silicon-on-insulator substrate. Our design uses lateral heat conduction in the silicon overlayer to establish temperature gradients, which dramatically reduces microfabrication complexity compared to competing designs based on a free-standing membrane. This letter characterizes the thermoelectric power of a metal-semiconductor structure involving a doped SbTe alloy that is relevant for phase-change memory. The thermoelectric power of the SbTe-TiW thermocouple is 24 μV/K, and the power generation output achieves up to 0.56 μW/cm² with a temperature gradient of 18°K.

@article{6104089, abstract = {We demonstrate techniques for measuring thermoelectric voltages and generating on-chip power using a silicon-on-insulator substrate. Our design uses lateral heat conduction in the silicon overlayer to establish temperature gradients, which dramatically reduces microfabrication complexity compared to competing designs based on a free-standing membrane. This letter characterizes the thermoelectric power of a metal-semiconductor structure involving a doped SbTe alloy that is relevant for phase-change memory. The thermoelectric power of the SbTe-TiW thermocouple is 24 μV/K, and the power generation output achieves up to 0.56 μW/cm² with a temperature gradient of 18°K.}, added-at = {2015-05-12T19:36:48.000+0200}, author = {Lee, Jaeho and Kim, SangBum and Marconnet, A. and in 't Zandt, M.A.A. and Asheghi, Mehdi and Wong, H.-S.P. and Goodson, Kenneth E.}, biburl = {https://www.bibsonomy.org/bibtex/2be86fca2520a6095e55b26facb02fb33/tennocrama}, doi = {10.1109/JMEMS.2011.2175704}, interhash = {e80680f3a34102fe39a08c8d4387ee32}, intrahash = {be86fca2520a6095e55b26facb02fb33}, issn = {1057-7157}, journal = {Microelectromechanical Systems, Journal of}, keywords = {ElectrothermalMetrology InfraredMicroscopy SeebeckCoefficient Thermoelectrics myown}, month = feb, number = 1, pages = {4-6}, timestamp = {2015-05-12T19:40:51.000+0200}, title = {Thermoelectric Characterization and Power Generation Using a Silicon-on-Insulator Substrate}, url = {http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6104089}, volume = 21, year = 2012 }