%0 Conference Paper %1 conf/csai/WuSC23 %A Wu, Jiangchen %A Shi, Yumeng %A Chen, Yining %B CSAI %D 2023 %I ACM %K dblp %P 467-474 %T A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Stacking Ensemble Learning. %U http://dblp.uni-trier.de/db/conf/csai/csai2023.html#WuSC23

@inproceedings{conf/csai/WuSC23, added-at = {2024-04-01T00:00:00.000+0200}, author = {Wu, Jiangchen and Shi, Yumeng and Chen, Yining}, biburl = {https://www.bibsonomy.org/bibtex/2d7101fd95145f89068bbe317f257a397/dblp}, booktitle = {CSAI}, crossref = {conf/csai/2023}, ee = {https://doi.org/10.1145/3638584.3638630}, interhash = {ea21a7711d4fd3587ee55365ae743a6a}, intrahash = {d7101fd95145f89068bbe317f257a397}, keywords = {dblp}, pages = {467-474}, publisher = {ACM}, timestamp = {2024-04-09T16:02:01.000+0200}, title = {A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Stacking Ensemble Learning.}, url = {http://dblp.uni-trier.de/db/conf/csai/csai2023.html#WuSC23}, year = 2023 }