Deposition mechanisms for promoting sp3 bonding in diamond-like carbon
Diamond and Related Materials, 2 (5-7):
984--989 (April 1993)Abstract
Deposition of amorphous carbon from medium energy ion beams promotes sp3, diamond-like bonding. It is proposed that the sp3 bonding arises from an increased density, owing to carbon ions entering subsurface atomic sites. An optimum ion energy arises from a balance between the incident carbon ions having sufficient energy to penetrate the surface atomic layer, while minimizing any excess energy dissipated in a thermal spike which can anneal out the density increment.
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