%0 Journal Article %1 journals/tsmc/QiaoWYZZ18 %A Qiao, Yan %A Wu, Naiqi %A Yang, FaJun %A Zhou, MengChu %A Zhu, Qinghua %D 2018 %J IEEE Trans. Syst. Man Cybern. Syst. %K dblp %N 4 %P 622-636 %T Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. %U http://dblp.uni-trier.de/db/journals/tsmc/tsmc48.html#QiaoWYZZ18 %V 48

@article{journals/tsmc/QiaoWYZZ18, added-at = {2021-02-05T00:00:00.000+0100}, author = {Qiao, Yan and Wu, Naiqi and Yang, FaJun and Zhou, MengChu and Zhu, Qinghua}, biburl = {https://www.bibsonomy.org/bibtex/2c6ebc8b4641034e1ca84d1a95453d903/dblp}, ee = {https://doi.org/10.1109/TSMC.2016.2600583}, interhash = {91876278f88be14b458a22755536681e}, intrahash = {c6ebc8b4641034e1ca84d1a95453d903}, journal = {IEEE Trans. Syst. Man Cybern. Syst.}, keywords = {dblp}, number = 4, pages = {622-636}, timestamp = {2024-04-08T19:19:19.000+0200}, title = {Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation.}, url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmc48.html#QiaoWYZZ18}, volume = 48, year = 2018 }