Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process.
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%0 Conference Paper
%1 conf/iasam/SungKHKHK19
%A Sung, Jin-Ho
%A Kim, San
%A Han, Bangwoo
%A Kim, Yong-Jin
%A Hong, Kee-Jung
%A Kim, Hak-Joon
%B IAS
%D 2019
%I IEEE
%K dblp
%P 1-7
%T Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process.
%U http://dblp.uni-trier.de/db/conf/iasam/iasam2019.html#SungKHKHK19
%@ 978-1-5386-4539-0
@inproceedings{conf/iasam/SungKHKHK19,
added-at = {2019-12-05T00:00:00.000+0100},
author = {Sung, Jin-Ho and Kim, San and Han, Bangwoo and Kim, Yong-Jin and Hong, Kee-Jung and Kim, Hak-Joon},
biburl = {https://www.bibsonomy.org/bibtex/23dffa80105b1187615a6d614f05939f0/dblp},
booktitle = {IAS},
crossref = {conf/iasam/2019},
ee = {https://doi.org/10.1109/IAS.2019.8912406},
interhash = {36e703ca276ce012e346a9ed680e5618},
intrahash = {3dffa80105b1187615a6d614f05939f0},
isbn = {978-1-5386-4539-0},
keywords = {dblp},
pages = {1-7},
publisher = {IEEE},
timestamp = {2019-12-06T11:40:55.000+0100},
title = {Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process.},
url = {http://dblp.uni-trier.de/db/conf/iasam/iasam2019.html#SungKHKHK19},
year = 2019
}
