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Track-etch templates designed for micro- and nanofabrication

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (2003)Ionizing Radiation and Polymers.
DOI: 10.1016/S0168-583X(03)00637-2

Аннотация

This paper reports on the advances made in the laboratory in the development of porous media by track-etching process, and on their use by research partners as templates for the micro- or nanofabrication of polymeric and metallic wires or tubules with interesting properties. It mainly relates to the development of nanoporous polycarbonate-based templates, and more precisely to pore-shape control in polycarbonate films, to the development of supported track-etch templates and to the feasibility of template patterning; recent results on the development of templates from polyimide support are also reported. Finally, some nanomaterial synthesis processes and properties are listed, with references to published papers.

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