%0 Thesis %1 leopold2002konzepte %A Leopold, Alexander %D 2002 %K %T Neue Konzepte zur Reinigung von Siliciumoberflächen

@phdthesis{leopold2002konzepte, added-at = {2023-12-13T09:17:40.000+0100}, author = {Leopold, Alexander}, biburl = {https://www.bibsonomy.org/bibtex/249678509eb20a228c60cc94a3cacc38f/admin}, dnbtitleid = {968489354}, interhash = {cc9fcca2ac4657962a0f0c14b25c8c9b}, intrahash = {49678509eb20a228c60cc94a3cacc38f}, keywords = {}, school = {TU München}, timestamp = {2023-12-13T09:17:40.000+0100}, title = {Neue Konzepte zur Reinigung von Siliciumoberflächen}, year = 2002 }