%0 Journal Article %1 journals/ipsj/KataokaYINW23 %A Kataoka, Gaku %A Yamamoto, Masahiro %A Inagi, Masato %A Nagayama, Shinobu %A Wakabayashi, Shin'ichi %D 2023 %J IPSJ Trans. Syst. LSI Des. Methodol. %K dblp %P 2-11 %T Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection. %U http://dblp.uni-trier.de/db/journals/ipsj/ipsj16.html#KataokaYINW23 %V 16

@article{journals/ipsj/KataokaYINW23, added-at = {2023-03-07T00:00:00.000+0100}, author = {Kataoka, Gaku and Yamamoto, Masahiro and Inagi, Masato and Nagayama, Shinobu and Wakabayashi, Shin'ichi}, biburl = {https://www.bibsonomy.org/bibtex/2bf75dfa842e1b9b73fb9e1e2d58574ea/dblp}, ee = {https://doi.org/10.2197/ipsjtsldm.16.2}, interhash = {fa0368891bbc5e53640f7c662133d424}, intrahash = {bf75dfa842e1b9b73fb9e1e2d58574ea}, journal = {IPSJ Trans. Syst. LSI Des. Methodol.}, keywords = {dblp}, pages = {2-11}, timestamp = {2024-04-08T10:18:38.000+0200}, title = {Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection.}, url = {http://dblp.uni-trier.de/db/journals/ipsj/ipsj16.html#KataokaYINW23}, volume = 16, year = 2023 }