%0 Journal Article %1 TANN2009 %A Tannner, D.M. %D 2009 %J Microelectronics Reliability %K imported %P pp. 937–940 %T MEMS reliability: Where are we now? %V 49

@article{TANN2009, added-at = {2013-01-07T16:10:56.000+0100}, author = {Tannner, D.M.}, biburl = {https://www.bibsonomy.org/bibtex/286b0f8481861dd4acee78a7bd26c1692/olivia.bluder}, file = {:P\:\\KAI_AP2\\People\\Plankensteiner\\DISS\\Literature_lifetimeModels\\ME_Reliability_2009.pdf:PDF}, interhash = {03f887327ef1c8cf03adefbd5a8dc4e0}, intrahash = {86b0f8481861dd4acee78a7bd26c1692}, journal = {Microelectronics Reliability}, keywords = {imported}, owner = {plankensteiner}, pages = {pp. 937–940}, timestamp = {2013-01-07T16:11:09.000+0100}, title = {MEMS reliability: Where are we now?}, volume = 49, year = 2009 }