%0 Journal Article %1 Xia1998 %A Xia, Younan %A Whitesides, George M. %D 1998 %I WILEY-VCH Verlag GmbH %J Angewandte Chemie International Edition %K microfluidics softlithography %N 5 %P 550--575 %R 10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G %T Soft Lithography %U http://dx.doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G %V 37 %X Elastomeric stamps and molds provide a great opportunity to eliminate some of the disadvantages of photolithograpy, which is currently the leading technology for fabricating small structures. In the case of “soft lithography” there is no need for complex laboratory facilities and high-energy radiation. Therefore, this process is simple, inexpensive, and accessible even to molecular chemists. The current state of development in this promising area of research is presented here.

@article{Xia1998, abstract = {Elastomeric stamps and molds provide a great opportunity to eliminate some of the disadvantages of photolithograpy, which is currently the leading technology for fabricating small structures. In the case of “soft lithography” there is no need for complex laboratory facilities and high-energy radiation. Therefore, this process is simple, inexpensive, and accessible even to molecular chemists. The current state of development in this promising area of research is presented here.}, added-at = {2013-05-08T11:49:30.000+0200}, author = {Xia, Younan and Whitesides, George M.}, biburl = {https://www.bibsonomy.org/bibtex/27a0034fd383c3542967cc24226f6745e/quantentunnel}, doi = {10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G}, file = {Xia1998.pdf:Artikel/Xia1998.pdf:PDF}, groups = {public}, interhash = {ad02340a9450b75283246ff5b05ac487}, intrahash = {7a0034fd383c3542967cc24226f6745e}, issn = {1521-3773}, journal = {Angewandte Chemie International Edition}, keywords = {microfluidics softlithography}, number = 5, pages = {550--575}, publisher = {WILEY-VCH Verlag GmbH}, timestamp = {2013-05-31T16:16:16.000+0200}, title = {Soft Lithography}, url = {http://dx.doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G}, username = {quantentunnel}, volume = 37, year = 1998 }