In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 micro signm resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 micro signm precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
%0 Journal Article
%1 Zhao2009
%A Zhao, Siwei
%A Cong, Hailin
%A Pan, Tingrui
%D 2009
%I The Royal Society of Chemistry
%J Lab on a Chip
%K cheap microchip microfluidics
%P 1128-1132
%R 10.1039/b817925e
%T Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics
%U http://dx.doi.org/10.1039/b817925e
%V 9
%X In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 micro signm resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 micro signm precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
@article{Zhao2009,
abstract = {In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 [micro sign]m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 [micro sign]m precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.},
added-at = {2011-10-01T01:05:44.000+0200},
author = {Zhao, Siwei and Cong, Hailin and Pan, Tingrui},
biburl = {https://www.bibsonomy.org/bibtex/238cdf877d4e446a3d8f19c3043312cf6/afcallender},
citeulike-article-id = {4129138},
citeulike-linkout-0 = {http://dx.doi.org/10.1039/b817925e},
citeulike-linkout-1 = {http://www.rsc.org/Publishing/Journals/article.asp?doi=b817925e},
doi = {10.1039/b817925e},
groups = {public},
interhash = {d47eb3d227096441f3e07d9b37cb0338},
intrahash = {38cdf877d4e446a3d8f19c3043312cf6},
journal = {Lab on a Chip},
keywords = {cheap microchip microfluidics},
pages = {1128-1132},
posted-at = {2009-12-16 14:16:06},
priority = {2},
publisher = {The Royal Society of Chemistry},
timestamp = {2011-10-01T01:05:44.000+0200},
title = {Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics},
url = {http://dx.doi.org/10.1039/b817925e},
username = {afcallender},
volume = 9,
year = 2009
}