%0 Thesis %1 zeitler1998synthese %A Zeitler, Michael %D 1998 %K %T Synthese und Spannungsanalyse von Bornitridschichten, hergestellt mittels ionengestützter Deposition

@phdthesis{zeitler1998synthese, added-at = {2023-12-12T17:37:12.000+0100}, author = {Zeitler, Michael}, biburl = {https://www.bibsonomy.org/bibtex/20773e8a30e5c7b418900a1b2c2b4d7ca/admin}, dnbtitleid = {956569641}, interhash = {064f347c63d65fa514e09ebd856732cd}, intrahash = {0773e8a30e5c7b418900a1b2c2b4d7ca}, keywords = {}, school = {Uni Augsburg}, timestamp = {2023-12-12T17:37:12.000+0100}, title = {Synthese und Spannungsanalyse von Bornitridschichten, hergestellt mittels ionengestützter Deposition}, year = 1998 }