%0 Conference Paper %1 conf/parco/HackenbergJM97 %A Hackenberg, Matthias G. %A Joppich, Wolfgang %A Mijalkovic, Slobodan %B PARCO %D 1997 %K dblp %P 211-215 %T Parallel Simulation of Coupled Oxidation and Diffusion in VLSI Wafer-Fabrication. %U http://dblp.uni-trier.de/db/conf/parco/parco97.html#HackenbergJM97

@inproceedings{conf/parco/HackenbergJM97, added-at = {2002-01-03T00:00:00.000+0100}, author = {Hackenberg, Matthias G. and Joppich, Wolfgang and Mijalkovic, Slobodan}, biburl = {https://www.bibsonomy.org/bibtex/23bdfbf5b8b5f7272127d5cce274087ca/dblp}, booktitle = {PARCO}, date = {2002-01-03}, description = {dblp}, interhash = {023bb71cd4b3ceb7984e10e25d042fd9}, intrahash = {3bdfbf5b8b5f7272127d5cce274087ca}, keywords = {dblp}, pages = {211-215}, timestamp = {2002-01-03T00:00:00.000+0100}, title = {Parallel Simulation of Coupled Oxidation and Diffusion in VLSI Wafer-Fabrication.}, url = {http://dblp.uni-trier.de/db/conf/parco/parco97.html#HackenbergJM97}, year = 1997 }