Inproceedings,
High-k MIM dielectric reliability study in 65nm node.
R. Achanta, V. McGahay, S. Boffoli, C. Kothandaraman, and J. Gambino.IRPS, page 32-1. IEEE, (2022)
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- conf/irps/AchantaMBKG22
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- inproceedings
- booktitle
- IRPS
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- 2022
- pages
- 32-1
- publisher
- IEEE
- crossref
- conf/irps/2022
- ee
- https://doi.org/10.1109/IRPS48227.2022.9764589
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- 978-1-6654-7950-9
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- http://dblp.uni-trier.de/db/conf/irps/irps2022.html#AchantaMBKG22
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%1 conf/irps/AchantaMBKG22
%A Achanta, Ravi
%A McGahay, V.
%A Boffoli, S.
%A Kothandaraman, C.
%A Gambino, J.
%B IRPS
%D 2022
%I IEEE
%K dblp
%P 32-1
%T High-k MIM dielectric reliability study in 65nm node.
%U http://dblp.uni-trier.de/db/conf/irps/irps2022.html#AchantaMBKG22
%@ 978-1-6654-7950-9
@inproceedings{conf/irps/AchantaMBKG22,
added-at = {2022-05-09T00:00:00.000+0200},
author = {Achanta, Ravi and McGahay, V. and Boffoli, S. and Kothandaraman, C. and Gambino, J.},
biburl = {https://www.bibsonomy.org/bibtex/2f38ee1744284fc03849a11ceb0505f82/dblp},
booktitle = {IRPS},
crossref = {conf/irps/2022},
ee = {https://doi.org/10.1109/IRPS48227.2022.9764589},
interhash = {06d6895dd7ed7cdb1e72f0359d5829b0},
intrahash = {f38ee1744284fc03849a11ceb0505f82},
isbn = {978-1-6654-7950-9},
keywords = {dblp},
pages = {32-1},
publisher = {IEEE},
timestamp = {2024-04-09T12:18:58.000+0200},
title = {High-k MIM dielectric reliability study in 65nm node.},
url = {http://dblp.uni-trier.de/db/conf/irps/irps2022.html#AchantaMBKG22},
year = 2022
}