%0 Journal Article %1 journals/todaes/LiZ17 %A Li, Xingquan %A Zhu, Wenxing %D 2017 %J ACM Trans. Design Autom. Electr. Syst. %K dblp %N 1 %P 6:1-6:23 %T Two-Stage Layout Decomposition for Hybrid E-Beam and Triple Patterning Lithography. %U http://dblp.uni-trier.de/db/journals/todaes/todaes23.html#LiZ17 %V 23

@article{journals/todaes/LiZ17, added-at = {2024-05-07T00:00:00.000+0200}, author = {Li, Xingquan and Zhu, Wenxing}, biburl = {https://www.bibsonomy.org/bibtex/22dac77469a27219cb6e0d9dcfd33cc5e/dblp}, ee = {https://doi.org/10.1145/3084683}, interhash = {0850016da7ba5a8352e3e8a751e5c855}, intrahash = {2dac77469a27219cb6e0d9dcfd33cc5e}, journal = {ACM Trans. Design Autom. Electr. Syst.}, keywords = {dblp}, number = 1, pages = {6:1-6:23}, timestamp = {2024-05-13T07:31:33.000+0200}, title = {Two-Stage Layout Decomposition for Hybrid E-Beam and Triple Patterning Lithography.}, url = {http://dblp.uni-trier.de/db/journals/todaes/todaes23.html#LiZ17}, volume = 23, year = 2017 }