%0 Journal Article %1 journals/mr/MataboschCKETC13 %A Matabosch, Nuria Torres %A Coccetti, Fabio %A Kaynak, Mehmet %A Espana, Beatrice %A Tillack, Bernd %A Cazaux, Jean-Louis %D 2013 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1659-1662 %T Failure analysis and detection methodology for capacitive RF-MEMS switches based on BEOL BiCMOS process. %U http://dblp.uni-trier.de/db/journals/mr/mr53.html#MataboschCKETC13 %V 53

@article{journals/mr/MataboschCKETC13, added-at = {2021-08-18T00:00:00.000+0200}, author = {Matabosch, Nuria Torres and Coccetti, Fabio and Kaynak, Mehmet and Espana, Beatrice and Tillack, Bernd and Cazaux, Jean-Louis}, biburl = {https://www.bibsonomy.org/bibtex/2d24e79e668109833dcbd91c2c20aa8af/dblp}, ee = {https://doi.org/10.1016/j.microrel.2013.07.099}, interhash = {09b42a5fde26e4cb686691b0be6cd0e3}, intrahash = {d24e79e668109833dcbd91c2c20aa8af}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1659-1662}, timestamp = {2024-04-09T02:49:13.000+0200}, title = {Failure analysis and detection methodology for capacitive RF-MEMS switches based on BEOL BiCMOS process.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr53.html#MataboschCKETC13}, volume = 53, year = 2013 }