%0 Conference Paper %1 conf/aimech/0002LZ19 %A Chen, Zhong %A Li, Zhipeng %A Zhang, Xianmin %B AIM %D 2019 %I IEEE %K dblp %P 1043-1048 %T Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages. %U http://dblp.uni-trier.de/db/conf/aimech/aim2019.html#0002LZ19 %@ 978-1-7281-2493-3

@inproceedings{conf/aimech/0002LZ19, added-at = {2019-10-24T00:00:00.000+0200}, author = {Chen, Zhong and Li, Zhipeng and Zhang, Xianmin}, biburl = {https://www.bibsonomy.org/bibtex/2f539e7ac700d984f12ac61d7323ff3f1/dblp}, booktitle = {AIM}, crossref = {conf/aimech/2019}, ee = {https://doi.org/10.1109/AIM.2019.8868383}, interhash = {09f97db60aed4c569cc5f13c22265d89}, intrahash = {f539e7ac700d984f12ac61d7323ff3f1}, isbn = {978-1-7281-2493-3}, keywords = {dblp}, pages = {1043-1048}, publisher = {IEEE}, timestamp = {2019-10-25T11:39:34.000+0200}, title = {Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages.}, url = {http://dblp.uni-trier.de/db/conf/aimech/aim2019.html#0002LZ19}, year = 2019 }