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%0 Conference Paper
%1 conf/ofc/ZhouTCLZLYL15
%A Zhou, Haifeng
%A Thi, Win Kay
%A Chen, Kok Kiong
%A Li, Chao
%A Zhang, Huijuan
%A Lim, Andy Eu-Jin
%A Yu, Mingbin
%A Lo, Guo-Qiang
%B OFC
%D 2015
%I IEEE
%K dblp
%P 1-3
%T Road to commercialize ArF technology for Si photonics through wafer-level assessment.
%U http://dblp.uni-trier.de/db/conf/ofc/ofc2015.html#ZhouTCLZLYL15
%@ 978-1-5575-2937-4
@inproceedings{conf/ofc/ZhouTCLZLYL15,
added-at = {2021-07-09T00:00:00.000+0200},
author = {Zhou, Haifeng and Thi, Win Kay and Chen, Kok Kiong and Li, Chao and Zhang, Huijuan and Lim, Andy Eu-Jin and Yu, Mingbin and Lo, Guo-Qiang},
biburl = {https://www.bibsonomy.org/bibtex/2c691155e285e9cf71d410510d201bf06/dblp},
booktitle = {OFC},
crossref = {conf/ofc/2015},
ee = {https://ieeexplore.ieee.org/document/7121994},
interhash = {0c700df6a646afbc88cd77df65ad3caf},
intrahash = {c691155e285e9cf71d410510d201bf06},
isbn = {978-1-5575-2937-4},
keywords = {dblp},
pages = {1-3},
publisher = {IEEE},
timestamp = {2024-04-09T21:53:18.000+0200},
title = {Road to commercialize ArF technology for Si photonics through wafer-level assessment.},
url = {http://dblp.uni-trier.de/db/conf/ofc/ofc2015.html#ZhouTCLZLYL15},
year = 2015
}