%0 Conference Paper %1 conf/nems/TanFPCCCL16 %A Tan, Wei-Siang %A Fang, Grace W. %A Pillai, Gayathri %A Chen, Cheng-Chi %A Chen, Chao-Yu %A Chin, Chi-Hang %A Li, Sheng-Shian %B NEMS %D 2016 %I IEEE %K dblp %P 516-519 %T Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators. %U http://dblp.uni-trier.de/db/conf/nems/nems2016.html#TanFPCCCL16 %@ 978-1-5090-1947-2

@inproceedings{conf/nems/TanFPCCCL16, added-at = {2023-03-21T00:00:00.000+0100}, author = {Tan, Wei-Siang and Fang, Grace W. and Pillai, Gayathri and Chen, Cheng-Chi and Chen, Chao-Yu and Chin, Chi-Hang and Li, Sheng-Shian}, biburl = {https://www.bibsonomy.org/bibtex/25f3b812e1186430ba8c9dec0ca30a4a3/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2016}, ee = {https://doi.org/10.1109/NEMS.2016.7758303}, interhash = {2003c94aa0794e356a0b583fa3692c2e}, intrahash = {5f3b812e1186430ba8c9dec0ca30a4a3}, isbn = {978-1-5090-1947-2}, keywords = {dblp}, pages = {516-519}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:28.000+0200}, title = {Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2016.html#TanFPCCCL16}, year = 2016 }