%0 Journal Article %1 citeulike:9386156 %A Sato, Norio %A Sato, Yasuhiro %A Kado, Yuichi %A Ciappa, Mauro %A Aemmer, Dölf %A Kaeslin, Hubert %A Fichtner, Wolfgang %D 2011 %J Journal of Microelectromechanical Systems %K mems 93b51-systems-theory-design-techniques 62k20-response-surface-designs %R 10.1109/jmems.2011.2140352 %T A Multilevel CMOS&\#x02013;MEMS Design Methodology Based on Response Surface Models %U http://dx.doi.org/10.1109/jmems.2011.2140352 %X We have developed a novel methodology to design systems composed of complementary metal–oxide–semiconductor (CMOS) and microelectromechanical systems (MEMS) parts. This multiscale methodology combines bottom-up modeling and top-down design-space exploration through the following steps: 1) In bottom-up modeling, characteristics of CMOS circuits and MEMS structures are accurately simulated at the circuit and MEMS device level; 2) on the basis of the results of a statistical regression method, these characteristics are abstracted into individual response surface models (RSMs), each with a set of coefficients of design parameters; 3) the models are mathematically connected to describe an elemental unit comprising CMOS and MEMS components; 4) the characteristics of the whole system of elemental units are abstracted into another RSM to cover the system performance; and 5) in top-down design-space exploration, the system requirements are connected to a set of design parameters for the CMOS circuits and MEMS structures by utilizing the RSMs in the reverse direction. To verify the concept, our design methodology was applied to a CMOS–MEMS fingerprint sensor. \$hfill\$ 2010-0084

@article{citeulike:9386156, abstract = {{We have developed a novel methodology to design systems composed of complementary metal–oxide–semiconductor (CMOS) and microelectromechanical systems (MEMS) parts. This multiscale methodology combines bottom-up modeling and top-down design-space exploration through the following steps: 1) In bottom-up modeling, characteristics of CMOS circuits and MEMS structures are accurately simulated at the circuit and MEMS device level; 2) on the basis of the results of a statistical regression method, these characteristics are abstracted into individual response surface models (RSMs), each with a set of coefficients of design parameters; 3) the models are mathematically connected to describe an elemental unit comprising CMOS and MEMS components; 4) the characteristics of the whole system of elemental units are abstracted into another RSM to cover the system performance; and 5) in top-down design-space exploration, the system requirements are connected to a set of design parameters for the CMOS circuits and MEMS structures by utilizing the RSMs in the reverse direction. To verify the concept, our design methodology was applied to a CMOS–MEMS fingerprint sensor. \$hfill\$ [2010-0084]}}, added-at = {2017-06-29T07:13:07.000+0200}, author = {Sato, Norio and Sato, Yasuhiro and Kado, Yuichi and Ciappa, Mauro and Aemmer, D\"{o}lf and Kaeslin, Hubert and Fichtner, Wolfgang}, biburl = {https://www.bibsonomy.org/bibtex/226d5d305c4989ac77fb4f95e8e6da441/gdmcbain}, citeulike-article-id = {9386156}, citeulike-attachment-1 = {sato_11_multilevel.pdf; /pdf/user/gdmcbain/article/9386156/660358/sato_11_multilevel.pdf; 569bb8a4404c6f526c8e8af55a13d5f6e9548a26}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/jmems.2011.2140352}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=5764817}, doi = {10.1109/jmems.2011.2140352}, file = {sato_11_multilevel.pdf}, interhash = {12797543870465dfc764d95a7df8ad4a}, intrahash = {26d5d305c4989ac77fb4f95e8e6da441}, issn = {1057-7157}, journal = {Journal of Microelectromechanical Systems}, keywords = {mems 93b51-systems-theory-design-techniques 62k20-response-surface-designs}, posted-at = {2011-06-06 03:01:02}, priority = {2}, timestamp = {2021-05-05T06:59:05.000+0200}, title = {{A Multilevel CMOS\&\#x02013;MEMS Design Methodology Based on Response Surface Models}}, url = {http://dx.doi.org/10.1109/jmems.2011.2140352}, year = 2011 }