%0 Conference Paper %1 conf/nems/ChuPZX17 %A Chu, Zhaozhi %A Peng, Chunrong %A Zheng, Fengjie %A Xia, Shanhong %B NEMS %D 2017 %I IEEE %K dblp %P 562-565 %T An electric field microsensor with metal-silicon structure. %U http://dblp.uni-trier.de/db/conf/nems/nems2017.html#ChuPZX17 %@ 978-1-5090-3059-0

@inproceedings{conf/nems/ChuPZX17, added-at = {2017-09-07T00:00:00.000+0200}, author = {Chu, Zhaozhi and Peng, Chunrong and Zheng, Fengjie and Xia, Shanhong}, biburl = {https://www.bibsonomy.org/bibtex/2f43a765414c8d84ed0f0f05ebc100069/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2017}, ee = {https://doi.org/10.1109/NEMS.2017.8017085}, interhash = {30993061c17b00487cd3c0702a6f9b9f}, intrahash = {f43a765414c8d84ed0f0f05ebc100069}, isbn = {978-1-5090-3059-0}, keywords = {dblp}, pages = {562-565}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:06.000+0200}, title = {An electric field microsensor with metal-silicon structure.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2017.html#ChuPZX17}, year = 2017 }