%0 Journal Article %1 journals/mr/LotnykPRGFBTR15 %A Lotnyk, Andriy %A Poppitz, D. %A Ross, U. %A Gerlach, J. W. %A Frost, Frank %A Bernütz, S. %A Thelander, E. %A Rauschenbach, B. %D 2015 %J Microelectron. Reliab. %K dblp %N 9-10 %P 2119-2125 %T Focused high- and low-energy ion milling for TEM specimen preparation. %U http://dblp.uni-trier.de/db/journals/mr/mr55.html#LotnykPRGFBTR15 %V 55

@article{journals/mr/LotnykPRGFBTR15, added-at = {2024-06-04T00:00:00.000+0200}, author = {Lotnyk, Andriy and Poppitz, D. and Ross, U. and Gerlach, J. W. and Frost, Frank and Bernütz, S. and Thelander, E. and Rauschenbach, B.}, biburl = {https://www.bibsonomy.org/bibtex/2afa2b9c933f1f9669957145f60208fca/dblp}, ee = {https://doi.org/10.1016/j.microrel.2015.07.005}, interhash = {37408f9b6ba1cb7eb8f96dd3d5e39f3f}, intrahash = {afa2b9c933f1f9669957145f60208fca}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {2119-2125}, timestamp = {2024-06-10T07:06:00.000+0200}, title = {Focused high- and low-energy ion milling for TEM specimen preparation.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr55.html#LotnykPRGFBTR15}, volume = 55, year = 2015 }