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%0 Journal Article
%1 journals/pieee/FedderHLQ08
%A Fedder, Gary K.
%A Howe, Roger T.
%A Liu, Tsu-Jae King
%A Quevy, Emmanuel P.
%D 2008
%J Proc. IEEE
%K dblp
%N 2
%P 306-322
%T Technologies for Cofabricating MEMS and Electronics.
%U http://dblp.uni-trier.de/db/journals/pieee/pieee96.html#FedderHLQ08
%V 96
@article{journals/pieee/FedderHLQ08,
added-at = {2022-10-02T00:00:00.000+0200},
author = {Fedder, Gary K. and Howe, Roger T. and Liu, Tsu-Jae King and Quevy, Emmanuel P.},
biburl = {https://www.bibsonomy.org/bibtex/2e2420448f71e25086cec49fdcc3de455/dblp},
ee = {https://doi.org/10.1109/JPROC.2007.911064},
interhash = {37612843bc4907a5be98f0d933b83e83},
intrahash = {e2420448f71e25086cec49fdcc3de455},
journal = {Proc. IEEE},
keywords = {dblp},
number = 2,
pages = {306-322},
timestamp = {2024-04-09T04:38:04.000+0200},
title = {Technologies for Cofabricating MEMS and Electronics.},
url = {http://dblp.uni-trier.de/db/journals/pieee/pieee96.html#FedderHLQ08},
volume = 96,
year = 2008
}
