%0 Journal Article %1 journals/tie/KimY16 %A Kim, In Joong %A Yun, Ilgu %D 2016 %J IEEE Trans. Ind. Electron. %K dblp %N 9 %P 5674-5681 %T Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens. %U http://dblp.uni-trier.de/db/journals/tie/tie63.html#KimY16 %V 63

@article{journals/tie/KimY16, added-at = {2020-05-22T00:00:00.000+0200}, author = {Kim, In Joong and Yun, Ilgu}, biburl = {https://www.bibsonomy.org/bibtex/29e2356137c990bfef0480acfc269ff1a/dblp}, ee = {https://doi.org/10.1109/TIE.2016.2571261}, interhash = {37af2960f61c1aae2e9f0500a1f62ce7}, intrahash = {9e2356137c990bfef0480acfc269ff1a}, journal = {IEEE Trans. Ind. Electron.}, keywords = {dblp}, number = 9, pages = {5674-5681}, timestamp = {2020-05-23T11:51:41.000+0200}, title = {Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens.}, url = {http://dblp.uni-trier.de/db/journals/tie/tie63.html#KimY16}, volume = 63, year = 2016 }