Reliability of the doping concentration in an ultra-thin body and buried oxide silicon on insulator (SOI) and comparison with a partially depleted SOI.
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%0 Journal Article
%1 journals/mr/ChangLY14
%A Chang, Wen-Teng
%A Lai, Chun-Ming
%A Yeh, Wen-Kuan
%D 2014
%J Microelectron. Reliab.
%K dblp
%N 2
%P 485-489
%T Reliability of the doping concentration in an ultra-thin body and buried oxide silicon on insulator (SOI) and comparison with a partially depleted SOI.
%U http://dblp.uni-trier.de/db/journals/mr/mr54.html#ChangLY14
%V 54
@article{journals/mr/ChangLY14,
added-at = {2020-02-22T00:00:00.000+0100},
author = {Chang, Wen-Teng and Lai, Chun-Ming and Yeh, Wen-Kuan},
biburl = {https://www.bibsonomy.org/bibtex/201e7bfd6b275ae1be6f9b9f0ffeb74ae/dblp},
ee = {https://doi.org/10.1016/j.microrel.2013.10.012},
interhash = {3d0fc67b0ab438654c2d3ac95a837317},
intrahash = {01e7bfd6b275ae1be6f9b9f0ffeb74ae},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = 2,
pages = {485-489},
timestamp = {2020-02-25T13:26:15.000+0100},
title = {Reliability of the doping concentration in an ultra-thin body and buried oxide silicon on insulator (SOI) and comparison with a partially depleted SOI.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr54.html#ChangLY14},
volume = 54,
year = 2014
}
