%0 Conference Paper %1 conf/cscwd/ShenWHZSYWLZ08 %A Shen, Lianguan %A Wang, Meiyan %A Hao, Yu %A Zhao, Gaofei %A Shu, Zhao %A Yuan, Sun %A Wang, Xiaodong %A Li, Mujun %A Zheng, Jinjin %B CSCWD %D 2008 %I IEEE %K dblp %P 913-918 %T MEMS lithography collaborative simulation environment research. %U http://dblp.uni-trier.de/db/conf/cscwd/cscwd2008.html#ShenWHZSYWLZ08 %@ 978-1-4244-1650-9

@inproceedings{conf/cscwd/ShenWHZSYWLZ08, added-at = {2017-05-24T00:00:00.000+0200}, author = {Shen, Lianguan and Wang, Meiyan and Hao, Yu and Zhao, Gaofei and Shu, Zhao and Yuan, Sun and Wang, Xiaodong and Li, Mujun and Zheng, Jinjin}, biburl = {https://www.bibsonomy.org/bibtex/2bf767bebc3f60923b7bb4ce5b59adbd8/dblp}, booktitle = {CSCWD}, crossref = {conf/cscwd/2008}, ee = {https://doi.org/10.1109/CSCWD.2008.4537101}, interhash = {452f418b3734504fb258d3b8c7dfa40f}, intrahash = {bf767bebc3f60923b7bb4ce5b59adbd8}, isbn = {978-1-4244-1650-9}, keywords = {dblp}, pages = {913-918}, publisher = {IEEE}, timestamp = {2019-10-17T20:54:59.000+0200}, title = {MEMS lithography collaborative simulation environment research.}, url = {http://dblp.uni-trier.de/db/conf/cscwd/cscwd2008.html#ShenWHZSYWLZ08}, year = 2008 }