%0 Conference Paper %1 conf/irps/SagongKCYSHJCPS18 %A Sagong, Hyun-Chul %A Kim, Hyunjin %A Choo, Seungjin %A Yoon, Sungyoung %A Shim, Hyewon %A Ha, Sangsu %A Jeong, Tae-Young %A Choe, Minhyeok %A Park, Junekyun %A Shin, Sangchul %A Pae, Sangwoo %B IRPS %D 2018 %I IEEE %K dblp %P 6 %T Effects of Far-BEOL anneal on the WLR and product reliability characterization of FinFET process technology. %U http://dblp.uni-trier.de/db/conf/irps/irps2018.html#SagongKCYSHJCPS18 %@ 978-1-5386-5479-8

@inproceedings{conf/irps/SagongKCYSHJCPS18, added-at = {2019-01-22T00:00:00.000+0100}, author = {Sagong, Hyun-Chul and Kim, Hyunjin and Choo, Seungjin and Yoon, Sungyoung and Shim, Hyewon and Ha, Sangsu and Jeong, Tae-Young and Choe, Minhyeok and Park, Junekyun and Shin, Sangchul and Pae, Sangwoo}, biburl = {https://www.bibsonomy.org/bibtex/25037fec114c2ab723b8d6248bfeebf7e/dblp}, booktitle = {IRPS}, crossref = {conf/irps/2018}, ee = {https://doi.org/10.1109/IRPS.2018.8353649}, interhash = {453d6590eecd95ff305c755ae94b0af6}, intrahash = {5037fec114c2ab723b8d6248bfeebf7e}, isbn = {978-1-5386-5479-8}, keywords = {dblp}, pages = 6, publisher = {IEEE}, timestamp = {2019-10-17T14:45:36.000+0200}, title = {Effects of Far-BEOL anneal on the WLR and product reliability characterization of FinFET process technology.}, url = {http://dblp.uni-trier.de/db/conf/irps/irps2018.html#SagongKCYSHJCPS18}, year = 2018 }