%0 Conference Paper %1 conf/nems/GuanY0LFCCYZWZ18 %A Guan, Taotao %A Yang, Fang %A Wang, Wei %A Liu, Peng %A Fan, Zexin %A Cheng, Leijian %A Chen, Zikun %A Yu, Runze %A Zhao, Qiancheng %A Wang, Wei %A Zhang, Dacheng %B NEMS %D 2018 %I IEEE %K dblp %P 397-400 %T A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness. %U http://dblp.uni-trier.de/db/conf/nems/nems2018.html#GuanY0LFCCYZWZ18 %@ 978-1-5386-5273-2

@inproceedings{conf/nems/GuanY0LFCCYZWZ18, added-at = {2023-02-28T00:00:00.000+0100}, author = {Guan, Taotao and Yang, Fang and Wang, Wei and Liu, Peng and Fan, Zexin and Cheng, Leijian and Chen, Zikun and Yu, Runze and Zhao, Qiancheng and Wang, Wei and Zhang, Dacheng}, biburl = {https://www.bibsonomy.org/bibtex/2c27561d40d579960a276172bbca87c52/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2018}, ee = {https://doi.org/10.1109/NEMS.2018.8556953}, interhash = {469f859e41e115fb09d134dd18c46bfd}, intrahash = {c27561d40d579960a276172bbca87c52}, isbn = {978-1-5386-5273-2}, keywords = {dblp}, pages = {397-400}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:20.000+0200}, title = {A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2018.html#GuanY0LFCCYZWZ18}, year = 2018 }