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%0 Conference Paper
%1 conf/wsc/AhnKCKKCH23
%A Ahn, Jeongsun
%A Kim, Hong-Yeon
%A Cho, Sang-Hyun
%A Kim, Hyun-Jung
%A Kim, Hongyeon
%A Choi, Hyeonjeong
%A Ham, Dain
%B WSC
%D 2023
%I IEEE
%K dblp
%P 2322-2332
%T Semiconductor Equipment Health Monitoring With Multi-View Data.
%U http://dblp.uni-trier.de/db/conf/wsc/wsc2023.html#AhnKCKKCH23
%@ 979-8-3503-6966-3
@inproceedings{conf/wsc/AhnKCKKCH23,
added-at = {2024-02-24T00:00:00.000+0100},
author = {Ahn, Jeongsun and Kim, Hong-Yeon and Cho, Sang-Hyun and Kim, Hyun-Jung and Kim, Hongyeon and Choi, Hyeonjeong and Ham, Dain},
biburl = {https://www.bibsonomy.org/bibtex/2a908604a4f97c6d6592335a89ae30e4a/dblp},
booktitle = {WSC},
crossref = {conf/wsc/2023},
ee = {https://doi.org/10.1109/WSC60868.2023.10407547},
interhash = {472069b3525b8d5d560cd080ae2500d2},
intrahash = {a908604a4f97c6d6592335a89ae30e4a},
isbn = {979-8-3503-6966-3},
keywords = {dblp},
pages = {2322-2332},
publisher = {IEEE},
timestamp = {2024-04-09T16:47:08.000+0200},
title = {Semiconductor Equipment Health Monitoring With Multi-View Data.},
url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2023.html#AhnKCKKCH23},
year = 2023
}